Journal Information
Microelectronic Engineering
Impact Factor:

Call For Papers
Microelectronic Engineering is the premier nano-processing, and nanotechnology journal focusing on fabrication of electronic, bioelectronic, electromechanic and fluidic devices and systems, and their applications in the broad areas of electronics, energy, life sciences, and environment. It covers also the expanding interdisciplinary field of "more than Moore" and "beyond Moore" integrated nanoelectronics and micro-nano systems. Through its unique mixture of peer-reviewed articles, reviews, accelerated publications, short and Technical notes, and the latest research news on key developments, Microelectronic Engineering provides comprehensive coverage of this exciting, interdisciplinary and dynamic new field for researchers in academia and professionals in industry.

The journal addresses the following topics:
a)Micro and Nano fabrication, Processing for Nanoelectronics (Lithography, Self-assembly, Plasma Processing, Metallization, 3D Integration, Related Materials)
b)Nanoelectronic, Photonic, Nanoenergy Devices and Systems (fabrication, application and related materials)
c)Micro - Nano Systems, Devices and Systems for Life Sciences, and Environment (Micro/Nano fluidics, MEMS/NEMS, BioMEMS, Lab on a chip)

In detail the topics covered are as follows:
1. Nanolithography and Nanopatterning
•optical lithography
•EUV lithography and masks
•charged particle based lithography and patterning
•nanoimprint lithography techniques and templates
•maskless lithography
•emerging nanopatterning methods
•limits of nanolithography and nanopatterning

2. Pattern Transfer
•ion technology
•plasma processing: etching, nanotexturing, bonding

3. Materials
•metallization and barrier materials
•silicon on insulators
•dielectrics (low K and high K)
•new resist materials
•nanomaterials for device fabrication
•block copolymers
•polymers and flexible substrates

4. Nanometrology, Inspection and Testing
•electron beam testers
•laser probes
•signal and image processing
•AFM, Scanning probe measurements

5. Advanced Processing and Nanofabrication
•process integration
•three dimensional integration
•rapid thermal processing
•process modelling and simulation
•equipment modelling
•laser assisted processing
•top-down / bottom-up (self - assembly) nanofabrication

6. Advanced Devices
•nanometer devices for electronics and optoelectronics
•dimension-sensitive device properties
•advanced MOS devices
•vacuum nanoelectronics
•organic and molecular electronics
•mesoscopic devices
•micro- & nanofluidics
•other miniaturized devices for biology, chemistry, medicine

7. Advanced fabrication and characterization for heterogeneous micro- and nanosystems
•electro-mechanical systems (MEMS, NEMS)
•optical systems
•fluidic systems

Manuscripts of 5 (five) types are considered:
• Review Articles that inform readers of the latest research and advances in nanoelectronics, nanofabrication, micro-nano systems, and applications,
• Accelerated Publications (Letters) that feature exciting research breakthroughs in the field,
• Regular original research papers
• Short / Technical notes intended for original limited investigations or short description of original industrial or industrially-related research and development work
• News and Opinions that comment on topical issues or express views on the developments in related fields, or comment on previously published work.
Last updated by Dou Sun in 2018-07-16
Special Issues
Special Issue on Micro & Nano Devices and Systems for Life Sciences, Chemistry and Agrofood sectors
Submission Date: 2019-10-21

This issue is an ‘open call’. This means that, while including selected papers presented at MNE2019, it is also open to other authors. Contributions to this topic should address biological, bioanalytical, and analytical problems, health, food and agrofood monitoring and safety, and show how micro/nano engineering can provide the appropriate solution, starting from microfluidics, scaffolds, biosensors, all the way to BioMEMS, lab on a chip and organ-on-a-chip. Targeted areas can be: Micro & Nano fluidics Chemical Sensors BioSensors Lab on Chip Cell on Chip, Organ on Chip Bio(MEMS) microTAS Applications in health, environmental monitoring, food safety, agrofood
Last updated by Dou Sun in 2019-05-09
Special Issue on Micro-Nano Devices and systems (MEMS/NEMS) for physical applications, electronics, photonics and energy
Submission Date: 2019-10-21

This issue is an ‘open call’. This means that, while including selected papers presented at MNE2019, it is also open to other authors. This topic encompasses the use of micro/nano fabrication methods for building up new solutions for application areas in Physical disciplines such as Nanoelectronics, Photonics, Plasmonics, Physical Sensing and Energy Harvesting. The solutions can be in the form of devices or complete microsystems. Contributions should not only describe the fabrication procedure, but should also include demonstration of the application and integration steps. This topic includes but is not limited to: Nanoelectronic Devices Photonic and plasmonic devices Nanomagnetism, Data storage Physical sensors Energy harvesting devices Paper Electronics, Flexible Electronics Micro & Nano systems (MEMS, NEMS) Integration of functionalities, Packaging
Last updated by Dou Sun in 2019-05-09
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